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M.C. Boysel
M.C. Boysel
Simon Fraser University
Chemical vapor deposition
Polycrystalline silicon
Microstructure
Combustion chemical vapor deposition
Metallurgy
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The Stress and Microstructure analysis of Polycrystalline Silicon Films Deposited by LPCVD
2012
MRS Proceedings
Y.T. Cherng
M.C. Boysel
Byron D. Gates
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