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Paul Jerabek
Paul Jerabek
Stanford University
Thin film
Reflection coefficient
Lithography
Ultraviolet
Photoresist
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Reflective masks for 1X deep ultraviolet lithography
1992
Robert L. Hsieh
Julienne Yu-Hey Lee
Nadim I. Maluf
R. Browning
Paul Jerabek
R. F. W. Pease
G. Owen
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