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Kazuyoshi Nakamura
Kazuyoshi Nakamura
NEC
Reticle
Engineering
Synchronization
Photolithography
Miniaturization
2
Papers
1
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0
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Resist pattern inspection function for LM7500 reticle inspection system
2008
Hideyuki Moribe
Yoshikazu Kato
Kazuyoshi Nakamura
Takeshi Bashomatsu
Takahiro Igeta
Kazuhito Ogihara
Takehiko Okada
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High-performance reticle inspection tool for the 65-nm node and beyond
2007
Tung-Yaw Kang
Chia-Hsien Chen
Chia Hui Ho
Luke Hsu
Yao-Ching Ku
Kazuyoshi Nakamura
Hideyuki Moribe
Takeshi Bashomatsu
Kenichi Matsumura
Keiichi Hatta
Hiroyuki Takahashi
Akira Uehara
Takahiro Igeta
Hiroshi Uno
Ryou Igarashi
Hiroaki Matsuda
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