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Mark Andrew Merrill
Mark Andrew Merrill
KLA-Tencor
Engineering
Optoelectronics
Engineering drawing
Lithography
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4
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5
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Implementation of automated macro after develop inspection in a production lithography process
2000
Arnold W. Yanof
Vincent E. Plachecki
Frank W. Fischer
Marcelo Cusacovich
Chris Nelson
Mark Andrew Merrill
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Accelerated yield learning in agressive lithography
2000
Kevin M. Monahan
Scott Ashkenaz
Xing Chen
Patrick J. Lord
Mark Andrew Merrill
Rich Quattrini
James N. Wiley
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Inspecting the new generation of reticles using UV imaging
1999
Mark Andrew Merrill
James N. Wiley
Benjamin George Eynon
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