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Chih-I Wei
Chih-I Wei
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Probability prediction of EUV process failure due to resist-exposure stochastic: applications of Gaussian random fields excursions and Rice's formula
2020
Azat Latypov
Gurdaman Khaira
Germain Fenger
John L. Sturtevant
Chih-I Wei
Peter De Bisschop
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Realizing more accurate OPC models by utilizing SEM contours
2020
Chih-I Wei
Rajiv Naresh Sejpal
Yunfei Deng
Ir Kusnadi
Germain Fenger
Masahiro Oya
Yosuke Okamoto
Kotaro Maruyama
Yuichiro Yamazaki
Sayantan Das
Sandip Halder
Werner Gillijns
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