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J. A. Allgair
J. A. Allgair
Semiconductor device fabrication
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Electronic engineering
Metrology
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2
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Low temperature ZEP-520A development process for enhanced critical dimension realization in reactive ion etch etched polysilicon
2007
Journal of Vacuum Science & Technology B
H. Wang
G. M. Laws
S. Miličić
P Boland
A. Handugan
M. Pratt
T. Eschrich
S. Myhajlenko
J. A. Allgair
B. Bunday
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Microeconomic of overlay control at the 65 nm technology node
2003
ISSM | International Symposium on Semiconductor Manufacturing
J. A. Allgair
K M Monahan
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