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D. Dattilo
D. Dattilo
SUSS MicroTec
Oxide
Oxygen
Nanotechnology
Oxidizing agent
Composite material
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Optimization of EUV Reticle Cleaning by Evaluation of Chemistries on Wafer-Based Mimic Test Structures
2016
Solid State Phenomena
Antoine Pacco
D. Dattilo
R. Jonckheere
Jens Rip
Uwe Dietze
J. Kruemberg
Frank Holsteyns
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