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M Wailher
M Wailher
Ion beam
Analytical chemistry
Dry etching
Isotropic etching
Photoluminescence
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Chemically-assisted ion-beam etching of (AIGa)As/GaAa: Lattice damage and removal by in-situ Cl 2 treatment
1999
Microelectronic Engineering
J. Daleiden
R. Kiefer
S Klußmann
M. Künzer
C Mänz
M Wailher
J. Braunstein
G. Weimann
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Citations (7)
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