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Yilin Qiu
Yilin Qiu
Photoresist
Photolithography
Optics
Anti-reflective coating
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Improving the performance of light-sensitive developer-soluble anti-reflective coatings by using adamantyl terpolymers
2009
Proceedings of SPIE
Jim D. Meador
Joyce Lowes
Charlyn Stroud
Sherilyn Thomas
Yilin Qiu
Ramil-Marcelo L. Mercado
Victor Pham
Mark Slezak
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