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Kyoji Nakajo
Kyoji Nakajo
Hitachi
Phase-shift mask
Engineering
Algorithm
Phase (waves)
Computer science
9
Papers
25
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Proximity-effect correction software for EPL using the pattern classify method
2004
Shigeki Mori
Akio Sato
Kyoji Nakajo
Masanori Shoji
Naomi Shimada
Hirokazu Sambayashi
Kenzo Goto
Fumio Murai
Hiroshi Fukuda
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Proximity-effect correction for EPL by using multiple pattern-area-density maps and pattern classification
2003
Fumio Murai
Hiroshi Fukuda
Shigeki Mori
Akio Sato
Kyoji Nakajo
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Automatic parallel optical proximity correction and verification system
2000
Takahiro Watanabe
Eiji Tsujimoto
Kyoji Nakajo
Keiji Maeda
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Automatic parallel optical proximity correction system for application with hierarchical data structure
1999
Eiji Tsujimoto
Takahiro Watanabe
Kyoji Nakajo
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Auxiliary pattern generation to cancel unexpected images at sidelobe overlap regions in attenuated phase-shift masks
1999
Kyoji Nakajo
Juniya Sakemi
Hiroshi Fukuda
Tsuneo Terasawa
Norio Hasegawa
Eiji Tsujimoto
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Automated method to check sidelobe overlap projected by adjacent apertures in attenuated phase-shift masks
1997
Kyoji Nakajo
Junya Sakemi
Akemi Moniwa
Tsuneo Terasawa
Norio Hasegawa
Eiji Tsujimoto
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