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H. Isselé
H. Isselé
Ellipsometry
Reflectometry
Photoresist
Analytical chemistry
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Optical metrology of thick photoresist process for advanced 3D applications
2014
Thin Solid Films
E. Nolot
A. André
C. Scibetta
M. Poulingue
L. Levin
L. Vignoud
H. Isselé
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