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Byungjun Woo
Byungjun Woo
Korea University
Reactive-ion etching
Analytical chemistry
Plasma
Materials science
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Comparative study of CF 4 + O 2 and C 6 F 12 O + O 2 plasmas for reactive‐ion etching applications
2021
Plasma Processes and Polymers
Nomin Lim
Alexander Efremov
Byungjun Woo
Kwang-Ho Kwon
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