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Klaus Wangemann
Klaus Wangemann
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Analytical chemistry
Dopant
Sheet resistance
Doping
Annealing (metallurgy)
1
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3
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2024
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Evaluation of barriers for B and P diffusion into As-doped polysilicon
1996
Thin Solid Films
Munir D. Naeem
Christopher Parks
Klaus Wangemann
Hans Glawischnig
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Citations (3)
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