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James Chen
James Chen
GlobalFoundries
Electronic engineering
Optoelectronics
Computer science
Dry etching
Physics
4
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7
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A Systematic Study on BEOL Defectivity Control for Future AI Application
2020
ASMC | Advanced Semiconductor Manufacturing Conference
James Chen
Fee Li Lie
Scott DeVries
Carol Boye
Sanjay C. Mehta
Thamarai S. Devarajan
Mary Claire Silvestre
Wei-Tsu Tseng
Massud A. Aminpur
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Citations (1)
A Novel Approach to Control Source/Drain Cavity Profile for Device Performance Improvement
2018
IEEE Transactions on Electron Devices
Hsien-Ching Lo
Jianwei Peng
Edward Reis
Baofu Zhu
Wei Ma
Seong Yeol Mun
Shashidhar Shintri
El Mehdi Bazizi
C. Gaire
Yi Qi
James Chen
Seng Nguon Ting
Owen Hu
Srikanth Samavedam
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Citations (3)
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