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K. R. Milkove
K. R. Milkove
Chemistry
Dry etching
Etching
Inorganic chemistry
Analytical chemistry
3
Papers
59
Citations
0.01
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Effects of argon addition to a platinum dry etch process
1998
Journal of Vacuum Science and Technology
K. R. Milkove
J. A. Coffin
C Dziobkowski
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Citations (21)
Insight into the dry etching of fence-free patterned platinum structures
1997
Journal of Vacuum Science and Technology
K. R. Milkove
C.X. Wang
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Lithography and fabrication processes for sub‐100 nm scale complementary metal–oxide semiconductor
1995
Journal of Vacuum Science & Technology B
Shalom J. Wind
Yuan Taur
Young Hoon Lee
Yuh-Jier Mii
R. Viswanathan
J. Bucchignano
Andrew Pomerene
Raymond M. Sicina
K. R. Milkove
J. W. Stiebritz
R. A. Roy
C.-K. Hu
M. P. Manny
S. Cohen
W. Chen
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Citations (10)
1