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Alexandre Vauselle
Alexandre Vauselle
Aix-Marseille University
Scattering
Integrated circuit design
Critical dimension
Scatterometer
Electronic engineering
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Micro Roughness Determination Of Periodic Microelectronics Structures Using Optical Far Field Measurements
2011
Alexandre Vauselle
Philippe Maillot
Gaëlle Georges
Carole Deumie
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