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ＡｌｘＧａ（１−ｘ）Ａｓ基板、赤外ＬＥＤ用のエピタキシャルウエハ、赤外ＬＥＤ、ＡｌｘＧａ（１−ｘ）Ａｓ基板の製造方法、赤外ＬＥＤ用のエピタキシャルウエハの製造方法および赤外ＬＥＤの製造方法

2009
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AlxGa (1-x) As substrate, an epitaxial wafer for an infrared LED, infrared LED, a method of manufacturing a AlxGa (1-x) As substrate, an epitaxial wafer manufacturing method and the infrared LED manufacturing method of for infrared LED

2009
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