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Saburo Uchida

Nagoya University

6

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141

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Hydrophilic Treatment of Inner Surface of Polymer Tubes using Tubular Low-Pressure Plasma

2010 Bulletin of the American Physical Society
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Evaluation of Property Changes due to Radiation, Radicals, and Ions on Organic Low-k Films in H2/N2 Plasma Etching

2008 Japanese Journal of Applied Physics
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Surface reactions during low-k etching using H2∕N2 plasma

2008 Journal of Vacuum Science and Technology
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