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A. Ho
A. Ho
University of Wisconsin-Madison
Laser
Optics
Physics
Miniaturization
Interferometry
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Extreme Ultraviolet Interferometric Lithography: A Path to Nanopatterning
2008
Synchrotron Radiation News
F. Cerrina
Artak Isoyan
F. Jiang
Yang-Chun Cheng
Q. Leonard
J. Wallace
K. Heinrich
A. Ho
Mikhail Yu. Efremov
Paul F. Nealey
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