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M. Takayanagi-Takagi
M. Takayanagi-Takagi
Electronic engineering
CMOS
MOSFET
Limiting factor
Engineering
2
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25
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Nitrogen concentration optimization for down-scaled CMOSFET with N/sub 2/O-based oxynitride process
1998
VLSIT | Symposium on VLSI Technology
Y. Okayama
K. Kasai
Takeshi Yamaguchi
A. Ooishi
M. Takayanagi-Takagi
F. Matsuoka
M. Kinugawa
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