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S.B. Feich
S.B. Feich
Ion implantation
MOSFET
CMOS
Plasma
Doping
1
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10
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Direct comparison of electrical performance of 0.1-/spl mu/m pMOSFETs doped by plasma doping or low energy ion implantation
2000
D. Lenoble
A. Grouillet
F. Arnaud
M. Haond
S.B. Feich
Z. Fang
Steven R. Walther
R.B. Liebert
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Citations (10)
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