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Roy A. Araujo

Texas A&M University

7

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129

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Mechanical Properties of Metal Nitrides for Radiation Resistant Coating Applications: A DFT Study☆

2015 Physics Procedia
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Cubic TaN diffusion barrier for Cu interconnects using an ultra-thin TiN seed layer

2008 Thin Solid Films
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Epitaxial cubic HfN diffusion barriers deposited on Si (001) by using a TiN buffer layer

2008 Journal of Vacuum Science & Technology B
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Ion irradiation effects in nanocrystalline TiN coatings

2007 Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
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Low resistivity hafnium nitride thin films as diffusion barriers for Cu interconnects

2007 ISDRS | International Semiconductor Device Research Symposium
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