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Vladimir F. Lukichev

Moscow Institute of Physics and Technology

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Modifying SOI Properties by the CO+ Molecular Ion Implantation

2020 EUROSOI-ULIS | Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon
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Phase transformation in ALD hafnia based layers for silicon-on-ferroelectric devices

2020 EUROSOI-ULIS | Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon
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