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S. Pfau
S. Pfau
University of Greifswald
Glow discharge
Atomic physics
Dry etching
Etching
Reactive-ion etching
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Low temperature dry etching of graphite anodes in hydrogen glow discharges
1991
Contributions To Plasma Physics
J. Nawra
S. Pfau
A. Resztak
T.-H. Richter
A. Rutscher
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