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Shay Goldstein
Shay Goldstein
Applied Materials
Inspection time
Mask inspection
Photolithography
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Applicability of e-beam mask inspection to EUV mask production
2012
Proceedings of SPIE
Lior Shoval
Shmoolik Mangan
Ishai Schwarzband
Sergey Khristo
Vivek Balasubramanian
Shay Goldstein
Ran Brikman
Nir Shoshani
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Citations (3)
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