Old Web
English
Sign In
Acemap
>
authorDetail
>
Noratika Mohammad Somari
Noratika Mohammad Somari
Universiti Teknologi MARA
Statistical process control
Plasma etching
Effective method
Contamination
Particle
3
Papers
9
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Identifying significant features for neural network-based particle contamination prediction in plasma etching process
2017
ICEESE | International Conference Electrical, Electronics and System Engineering
Mohd Firdaus Abdullah
Muhammad Khusairi Osman
Noratika Mohammad Somari
Nurfadzilah Ahmad
Adi Izhar Che Ani
Sooria Pragash Rao S. Appanan
Loh Kwang Hooi
Show All
Source
Cite
Save
Citations (1)
Particles contaminations detection during plasma etching process by using k-nearest neighbors and Fuzzy k-nearest neighbors
2016
ICCSCE | IEEE International Conference on Control System, Computing and Engineering
Noratika Mohammad Somari
Mohd Firdaus Abdullah
Muhammad Khusairi Osman
Abdul Mu iz Nazelan
Khairul Azman Ahmad
Sooria Pragash Rao S. Appanan
Loh Kwang Hooi
Show All
Source
Cite
Save
Citations (4)
In-situ particle monitor using virtual metrology system for measuring particle contamination during plasma etching process
2016
ICCSCE | IEEE International Conference on Control System, Computing and Engineering
Mohd Firdaus Abdullah
Muhammad Khusairi Osman
Noratika Mohammad Somari
Adi Izhar Che Ani
Sooria Pragash Rao S. Appanan
Loh Kwang Hooi
Show All
Source
Cite
Save
Citations (4)
1