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Jyunichi Kurokawa
Jyunichi Kurokawa
Raman spectroscopy
Thin film
Doping
Boron
Residual stress
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Evaluation of residual stresses in thin films by means of micro-Raman spectroscopy
1997
MRS Proceedings
Kazuyuki Mizuhara
Shinichi Takahashi
Jyunichi Kurokawa
Noboru Morita
Yoshitaro Yoshida
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