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Michael Murray
Michael Murray
Intel
Reticle
Crystal growth
Nanotechnology
Analytical chemistry
Photolithography
2
Papers
6
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0
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ArF lithography reticle crystal growth contributing factors
2004
Florence Eschbach
Daniel Selassie
Peter Sanchez
Daniel Tanzil
Vikram Tolani
Mahmood Toofan
Huiying Liu
Barbara Greenebaum
Michael Murray
Raul Villacorta
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Citations (6)
Arf lithography reticle crystal growth contributing factors
2004
Florence Eschbach
Daniel Selassie
Peter Sanchez
Daniel Tanzil
Vikram Tolani
Mahmood Toofan
Huiying Liu
Barbara Greenebaum
Michael Murray
Raul Villacorta
Show All
Source
Cite
Save
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