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kazuma tanaka
kazuma tanaka
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SiH₄+N₂マルチホロー放電プラズマCVDによるSiN製膜時のクラスターの取り込み (放電 プラズマ・パルスパワー合同研究会・環境浄化技術・一般)
2018
syouta nagaisi
åè¼ ä½ã æ¨
kazuma tanaka
takasi hara
susumu rei kama taki
nao itagaki
kazunori koga
masazi siratani
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