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Wolfram Grundke
Wolfram Grundke
Advanced Micro Devices
Laser
Lithography
Photolithography
Optics
Materials science
4
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16
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A method for detecting repeating defects in lithography masks based on test substrates which are exposed under varying conditions
2007
Uwe Griebenow
Martin Mazur
Wolfram Grundke
Andre Poock
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ACLV-analysis in production and its impact on product performance
2003
Rolf Seltmann
Rolf Stephan
Martin Mazur
Christopher A. Spence
Bruno La Fontaine
Dirk Stankowski
Andre Poock
Wolfram Grundke
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New system for fast submicron laser direct writing.
1995
Heinz Kueck
Michael Bollerott
Wolfgang Doleschal
Andreas Gehner
Wolfram Grundke
Detlef Kunze
R. Melcher
J. Paufler
Rolf Seltmann
G. Zimmer
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Citations (8)
1