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Henk van Greevenbroek
Henk van Greevenbroek
ASML Holding
Optics
Reticle
Numerical aperture
Electronic engineering
Engineering
4
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57
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Enabling the 45nm node by hyper-NA polarized lithography
2006
Wim de Boeij
Geert Swinkels
Nicolas le Masson
Armand Eugene Albert Koolen
Henk van Greevenbroek
Michel Fransois Hubert Klaassen
Mark van de Kerkhof
Koen van Ingen Schenau
Laurens de Winter
Martijn Gerard Dominique Wehrens
Steve Hansen
Christian Wagner
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Citations (7)
Optimizing and Enhancing Optical Systems to Meet the Low k 1 Challenge
2003
Donis G. Flagello
Robert John Socha
Xuelong Shi
Jan van Schoot
Jan Baselmans
Mark van de Kerkhof
Wim de Boeij
Andre Engelen
Rene Carpaij
Oscar Noordman
Marco Hugo Petrus Moers
Melchior Mulder
Jo Finders
Henk van Greevenbroek
Martin Schriever
Manfred Maul
Helmut Haidner
Markus Goeppert
Ulrich Wegmann
Paul Graeupner
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Citations (11)
Can DUV take us below 100 nm
2001
Jo Finders
Louis Jorritsma
Mark Eurlings
Richard Moerman
Henk van Greevenbroek
Jan van Schoot
Donis G. Flagello
Robert John Socha
Thomas Stammler
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Citations (2)
Aerial image measurement methods for fast aberration set-up and illumination pupil verification
2001
Hans Van Der Laan
Marcel Mathijs Theodore Marie Dierichs
Henk van Greevenbroek
Elaine McCoo
Fred Stoffels
Richard Pongers
Rob Willekers
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Citations (37)
1