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Zhigang Xie
Zhigang Xie
Applied Materials
Tin
Engineering
Electronic engineering
Semiconductor device fabrication
Coating
4
Papers
19
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Control of bombardment energy and energetic species toward a superdense titanium nitride film
2010
Journal of Vacuum Science and Technology
Zhigang Xie
Adolph Miller Allen
Mei Chang
Phillip Wang
Tza-Jing Gung
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Citations (6)
High-k/metal gate stacks in gate first and replacement gate schemes
2010
ASMC | Advanced Semiconductor Manufacturing Conference
Sree Rangasai V. Kesapragada
Rongjun Wang
Dave Liu
Guojun Liu
Zhigang Xie
Zhenbin Ge
Haichun Yang
Yu Lei
Xinliang Lu
Xianmin Tang
Jianxin Lei
Miller Allen
Srinivas Gandikota
Kevin Moraes
Steven Hung
Naomi Yoshida
Chorng-Ping Chang
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Citations (9)
PVD TiN Hardmask for Copper Metallization ISSM Paper: PE-O-203
2007
Zhigang Xie
Ashish Bodke
Jianming Fu
Rahul Jauhari
Magdy Abdelrahman
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PVD TiN hardmask for copper metallization
2007
ISSM | International Symposium on Semiconductor Manufacturing
Zhigang Xie
Ashish Bodke
Jianming Fu
Rahul Jauhari
Magdy Abdelrahman
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Citations (4)
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