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Yehya Haidar
Yehya Haidar
University of Nantes
Analytical chemistry
Chemistry
Plasma
Ion
Particle
2
Papers
15
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Simulation of cryogenic silicon etching under SF6/O2/Ar plasma discharge
2016
Journal of Vacuum Science and Technology
Yehya Haidar
Ahmed Rhallabi
Amand Pateau
Arezki Mokrani
F. Taher
Fabrice Roqueta
Mohamed Boufnichel
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Citations (7)
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