Old Web
English
Sign In
Acemap
>
authorDetail
>
David Hetzer
David Hetzer
Metrology
Semiconductor device fabrication
Electrical engineering
Reflectivity
Development environment
1
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Integrated ODP Metrology Matching To Reference Metrology For Lithography Process Control
2009
P.D. Kearney
Junichi Uchida
Heiko Weichert
D.V. Likhachev
David Hetzer
Göran Fleischer
Show All
Source
Cite
Save
Citations (0)
1