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Francesco Villasmunta
Francesco Villasmunta
University of Rome Tor Vergata
Materials science
Silicon
Rigorous coupled-wave analysis
Metrology
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2
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1
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Silicon-organic hybrid photonics: Overview of recent advances, electro-optical effects and CMOS-integration concepts
2021
Patrick Steglich
Christian Mai
Claus Villringer
Birgit Dietzel
Siegfried Bondarenko
Viachaslau Ksianzou
Francesco Villasmunta
Christoph Zesch
Silvio Pulwer
Martin Burger
J. Bauer
Friedhelm Heinrich
Sigurd Schrader
Francesco Vitale
Fabio De Matteis
Paolo Prosposito
Mauro Casalboni
Andreas Mai
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Spectroscopic reflectometry for characterization of Through Silicon Via profile of Bosch etching process
2019
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
J. Bauer
O. Fursenko
Steffen Marschmeyer
Friedhelm Heinrich
Francesco Villasmunta
Claus Villringer
Christoph Zesch
Sigurd Schrader
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