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Sung Moo Soe
Sung Moo Soe
Kyung Hee University
Substrate (chemistry)
Chemical engineering
Deposition (law)
Etching
Crystallite
1
Papers
2
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Microcrystal Si Films Prepared by Remote Plasma CVD
1989
MRS Proceedings
Sung Chul Kim
Jung Tae Hwang
Seungkyu Lee
Chang Young Jung
Sung Moo Soe
Sung Ok Koh
Kwan-Soo Chung
Jin Jang
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Citations (2)
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