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K. Perez Toralla
K. Perez Toralla
Centre national de la recherche scientifique
Polymer
Optics
Nanolithography
Nanoimprint lithography
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2
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15
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High flowability monomer resists for thermal nanoimprint lithography
2009
Microelectronic Engineering
K. Perez Toralla
J. De Girolamo
D. Truffier-Boutry
C. Gourgon
M. Zelsmann
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Citations (6)
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