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Charles N. Tabory
Charles N. Tabory
Analytical chemistry
Capacitor
Breakdown voltage
Self-aligned gate
MISFET
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Plasma deposited SiO2 for planar self‐aligned gate metal–insulator–semiconductor field effect transistors on semi‐insulating InP
1994
Journal of Vacuum Science & Technology B
Charles N. Tabory
Paul G. Young
Edwyn D. Smith
Samuel A. Alterovitz
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