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E. Mile
E. Mile
Engineering
Electronic engineering
Nanoelectromechanical systems
CMOS
Transistor
2
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7
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0
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Sensitive in plane motion detection of NEMS through semiconducting (p+) piezoresistive gauge transducers
2009
SENSORS | IEEE Sensors
E. Mile
Guillaume Jourdan
Laurent Duraffourg
Sébastien Labarthe
C. Marcoux
D. Mercier
Ph. Robert
Philippe Andreucci
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NEMS based on top-down technologies: from stand-alone NEMS to VLSI NEMS & NEMS-CMOS integration
2008
EDSSC | International Conference on Electron Devices and Solid-State Circuits
Eric Ollier
Philippe Andreucci
Laurent Duraffourg
Eric Colinet
C. Durand
Fabrice Casset
T. Ernst
Sébastien Hentz
Sébastien Labarthe
C. Marcoux
Valerie Nguyen
Denis Renaud
E. Mile
P. Renaux
D. Mercier
Ph. Robert
Pascal Ancey
L. Bouchaillot
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Citations (4)
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