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Mert Karakoy
Mert Karakoy
GlobalFoundries
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Inline detection for FinFET gate poly footing using e-Tilt metrology
2018
ASMC | Advanced Semiconductor Manufacturing Conference
Xiaoxiao Zhang
Mert Karakoy
Kejia Wu
Zhuangfei Chen
Zhenhua Ge
Navi Krishnan
Amit Siany
Shimon Levi
Ishai Schwarzband
Roman Kris
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Nested interconnect macro electrical yield improvement for advanced triple patterning integration
2017
ASMC | Advanced Semiconductor Manufacturing Conference
Mary Claire Silvestre
Ming He
Anbu Selvam Km Mahalingam
Craig Child
Alycia Roux
Chun Hui Low
Daniel Fisher
Yue Zhou
DeNeil Park
Mert Karakoy
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On-product eBeam overlay topic/category AM: Advanced metrology
2017
ASMC | Advanced Semiconductor Manufacturing Conference
Mert Karakoy
Yue Zhou
Dongsuk Park
Zhenhua Ge
Amit Siany
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On-Product eBeam Overlay topic/category AM: Advanced metrology
2017
MIPRO | International Convention on Information and Communication Technology, Electronics and Microelectronics
Mert Karakoy
Yue Zhou
Dongsuk Park
Zhenhua Ge
Amit Siany
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Nested interconnect macro electrical yield improvement for advanced triple patterning integration
2017
MIPRO | International Convention on Information and Communication Technology, Electronics and Microelectronics
Mary Claire Silvestre
Ming He
Anbu Selvam Km Mahalingam
Craig Child
Alycia Roux
Chun Hui Low
Daniel Fisher
Yue Zhou
DeNeil Park
Mert Karakoy
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