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Robert E. Lafon
Robert E. Lafon
Sandia National Laboratories
Reticle
Extreme ultraviolet
Laser
Radiation
Plasma
1
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3
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High-power laser-produced-plasma EUV source
2002
William P. Ballard
Luis J. Bernardez
Robert E. Lafon
Richard J. Anderson
Yon E. Perras
Alvin H. Leung
Harry Shields
Michael B. Petach
Randall J. St. Pierre
Robert L. Bristol
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