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Tae Gon Kim
Tae Gon Kim
IMEC
Materials science
Composite material
Atomic force microscopy
Analytical chemistry
Nanotechnology
5
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15
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Atomic Resolution Quality Control for Fin Oxide Recess by Atomic Resolution Profiler
2016
Solid State Phenomena
Tae Gon Kim
Heon-Yul Ryu
Karine Kenis
Ah Jin Jo
Sang-Joon Cho
Sang-Il Park
Sebastian W. Schmidt
Bernd Irmer
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Study of wetting of nanostructures using decoration by etching
2014
Solid State Phenomena
Guy Vereecke
Xiu Mei Xu
Els Kesters
Ishan Simms
Kathleen Nafus
Leander Haensel
Tae Gon Kim
Mark Lismont
Frank Holsteyns
Stefan De Gendt
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Effects of Interfacial Strength and Dimension of Structures on Physical Cleaning Window
2012
Solid State Phenomena
Tae Gon Kim
Antoine Pacco
Kurt Wostyn
Steven Brems
Xiu Mei Xu
Herbert Struyf
Kai Arstila
B. Vandevelde
Jin-Goo Park
Stefan De Gendt
Paul W. Mertens
Marc Heyns
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Characterization of Low-k Dielectric Etch Residue on the Sidewall by Chemical Force Microscope
2012
Solid State Phenomena
Tae Gon Kim
Quoc Toan Le
Samuel Suhard
Marcel Lux
Guy Vereecke
Martine Claes
Herbert Struyf
Stefan De Gendt
Paul W. Mertens
Marc Heyns
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Correlation of Collapse Forces Determined by Lateral Force AFM with Damage Generation due to Physical Cleaning Processes
2011
Electrochemical and Solid State Letters
Antoine Pacco
Tae Gon Kim
Paul W. Mertens
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Citations (4)
1