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D. Chapek
D. Chapek
University of Wisconsin-Madison
Ion implantation
Physics
Atomic physics
Ion beam
Nuclear magnetic resonance
2
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Plasma source ion implantation: history, successes, failures, challenges, and future prospects
1995
ICOPS | International Conference on Plasma Science
J. R. Conrad
James P. Blanchard
J. D. Callen
D. Chapek
A. Chen
R.A. Dodd
G. A. Emmert
R.P. Fetherston
J. Firmiss
M.P. Hong
N. Horswill
M.W. Kissick
Shamim M. Malik
P.J. Marko
R.J. Maryi
Kumar Sridharan
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Boron implantation using plasma source ion implantation (PSII)
1995
ICOPS | International Conference on Plasma Science
P. Fetherston
D. Chapek
M. Shamim
J. R. Conrad
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