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A. Yu. Ustavschikov
A. Yu. Ustavschikov
Glow discharge
Analytical chemistry
Electron
Ion
Hydrogen
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EFFECT OF ION BOMBARDMENT IN VERY-HIGH FREQUENCY GLOW DISCHARGE ON GROWTH AND PROPERTIES OF SIHX FILMS
1997
Journal of Vacuum Science and Technology
A. I. Kosarev
A.S. Smirnov
A. S. Abramov
A J Vinogradov
A. Yu. Ustavschikov
M. V. Shutov
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Citations (12)
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