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Yul Koh

Agency for Science, Technology and Research

5

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A Novel Fabrication Platform for Acceleration Sensor Switch with Top Contacts

2021 TRANSDUCERS | International Conference on Solid-State Sensors, Actuators and Microsystems
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High Resolution, High Frequency Ultrasonic Ranging in Air with pMUTs

2021 IUS | Internaltional Ultrasonics Symposium
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Silicon-On-Nothing ScAlN pMUTs

2021 IUS | Internaltional Ultrasonics Symposium
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Piezoelectric over Silicon-on-Nothing (pSON) process

2021 IUS | Internaltional Ultrasonics Symposium
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Reduced TCF, High Frequency, Piezoelectric Contour-Mode Resonators with Silicon-on-Nothing

2021 IUS | Internaltional Ultrasonics Symposium
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