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Shudong Men
Shudong Men
Chinese Academy of Sciences
Optics
Wavefront aberration
Azimuth
Physics
Photolithography
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A new method to optimize the azimuth angle of elements in a projection lens
2016
Optics Communications
Chunlai Liu
Hongbo Shang
Yang Zhao
Ping Wang
Quansong Li
Shudong Men
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