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Nobuhiro Misawa
Nobuhiro Misawa
Chemical vapor deposition
Inorganic chemistry
Materials science
Chemical engineering
Low-k dielectric
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An apparatus for chemical vapor deposition.
1990
Tatsushi Hara
Nobuhiro Misawa
Toshiya Suzuki
Takayuki Ohba
Fumitake Mieno
Akio Yamaguchi
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