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T.H. Tsai
T.H. Tsai
National Taipei University of Technology
Adsorption
Oxide
Tantalum
Hydrogen
Phosphoric acid
1
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Acetic acid and phosphoric acid adding to improve tantalum chemical mechanical polishing in hydrogen peroxide-based slurry
2010
Microelectronic Engineering
Y.H. Chen
T.H. Tsai
Shi-Chern Yen
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Citations (17)
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