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Makoto Miyagi
Makoto Miyagi
Synopsys
Lithography
Chip
Resist
Extreme ultraviolet lithography
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5
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2
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Predicting very rare stochastic defects in EUVL processes for full-chip correction and verification
2021
Zachary Adam Levinson
Yudhishthir Kandel
Makoto Miyagi
Kevin Lucas
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Compact modeling to predict and correct stochastic hotspots in EUVL
2020
Zachary Levinson
Yudhishthir Kandel
Yunqiang Zhang
Qiliang Yan
Makoto Miyagi
Xiaohai Li
Kevin Lucas
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3D resist profile modeling for OPC applications
2013
Proceedings of SPIE
Yongfa Fan
Kar Kit Koh
Qing Yang
Wolfgang Hoppe
Bernd Kuechler
Puvan Perampalam
Makoto Miyagi
Lena Zavyalova
Thomas Schmoeller
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Hybrid OPC verification flow with compact and rigorous models
2012
KunYuan Chen
ChunCheng Liao
ChiaWei Tsai
ChaoHeng Chen
Makoto Miyagi
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Integrated advanced hotspot analysis techniques in the post-OPC verification flow
2011
Makoto Miyagi
Peter Brooker
Chander Sawh
Travis Brist
Kunal Taravade
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