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H. Murmann-Biesenecker
H. Murmann-Biesenecker
Actuator
Piezoelectricity
Materials science
Electronic engineering
Deflection (engineering)
4
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4
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Piezoelectric micro actuator with an integrated sensor to control the air flow in a micro valve
2004
J. Schmid
U. Töpfer
H. Murmann-Biesenecker
Gebhardt Munz
Andreas Münzenmaier
Martin Maichl
R. G. Ballas
Helmut F. Schlaak
Thorsten Steinkopff
Carsten Schuh
M. Laurent
Hermann Bödinger
Martin Hoffmann
Steven Wagner
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High-accuracy sensor electronics for deflection measurement of a piezoelectric bending beam multilayer actuator
2004
R. G. Ballas
Andreas Schmid
Helmut F. Schlaak
A. Kolb
A. Mössinger
Peter Meissner
U. Töpfer
H. Murmann-Biesenecker
Gebhardt Munz
Martin Maichl
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